Nano Positioning Stage

The nano positioning scanner driven by PZT or VCM can move samples with a high speed and accuracy as well as large working range. It is suitable to scan with nano level accuracy for various applications such as SPMs.

nano positioning stage

Features

ㆍOptimized leaf spring structure
ㆍVivration reduction control
ㆍVariable size and multi-DOF of the scanner
ㆍBuilt-in high resolution capacitive sensor(resolution:0.1nm)

Specification

Resolution	< 0.1nm
Bandwidth	300Hz (PZT, open loop)
Repeatability	< 0.05nm
Scanning area	0 ~ 100 x 100㎛ (PZT type) 0 ~ 300 x 300㎛ (VCM type)
Load weight	700grf
Size	Various dimension

nano positioning features

개인정보 보호정책 / 이메일 무단수집 거부

EM4SYS FAMILY SITE:

#503 B-dong Gwangju HiTech Center,

958-14 Bunju Daechon-dong Buk-ku Gwangju 500-470, Korea ☏ 062-971-3512 / Fax. 062-972-3509