▒▒ EM4SYS ▒▒

▒▒ EM4SYS ▒▒

Personal Atomic Force Microscope
Nano Positioning Stage
Confocal Microscope
6-axis Desktop Active Vibration Isolation
System
Capacitive Sensor

Laser Scanning Vibrometer(LSV-D)
Laser Vibrometer
(LV-110D)
Laser Displacement Sensor(PSD)
Laser Scanner

Specimen Automatic Positioner
Precision Motorized Stage

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Home > Product > 6-axis Desktop Active Vibration...

The active vibration isolation system(AVIS) attenuates the vibration transmitted from the ground to the table in all 6-axis direction using vibration sensors and voice coil actuators. It is very effective in low frequency vibration control, which is important to nano-measurement instrument such as AFM and semiconductor fabrication equipment.





· Active isolation in all six-degrees of freedom vibration · Eight voice coil actuators (vertical +/-10N, horizontal +/-10N) - 20dB vibration isolation above 2Hz · Sensor & actuator operation monitoring using LEDs · Compact dimensions (410 x 440 x 95mm) · Load capacity : 15 ~ 60kgf · Load adjustment · Application : Atomic Force Microscope (AFM), Scanning Electronic Microscope(SEM), Confocal Microscope, etc

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