6-Axis Active Vibration Isolation System | EM4SYS

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6-axis Desktop Active Vibration Isolation system

The active vibration isolation system(AVIS) attenuates the vibration transmitted from the ground to the table in all 6-axis direction using vibration sensors and voice coil actuators. It is very effective in low frequency vibration control, which is important to nano-measurement instrument such as AFM and semiconductor fabrication equipment.

Applications

6-axis vibration isolation system application

Features

· Active isolation in all six-degrees of freedom vibration

· Eight voice coil actuators (vertical +/-10N, horizontal +/-10N)

- 20dB vibration isolation above 2Hz

· Sensor & actuator operation monitoring using LEDs

· Compact dimensions (410 x 440 x 95mm)

· Load capacity : 15 ~ 60kgf

· Load adjustment

· Application : Atomic Force Microscope (AFM), Scanning Electronic Microscope(SEM), Confocal Microscope,
etc

Vibration isolation performance

6-axis vibration isolation system performance

개인정보 보호정책 / 이메일 무단수집 거부

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#503 B-dong Gwangju HiTech Center,

958-14 Bunju Daechon-dong Buk-ku Gwangju 500-470, Korea ☏ 062-971-3512 / Fax. 062-972-3509