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Home > Product > Nano measuring instrument

An atomic force microscopy(AFM) can look inside a nano world that can't be seen with a rare eye since it has a resolution of atomic level. It can see a tiny thing as small as 1/10,0000 of a hair thickness (100um). It is used for obtaining the 3D measurement of the metrology, topography, hardness, roughness, electricity, and magnetics of materials with nano scale resolution. We aim to distribute the AFM for the personal use purpose, called a personal AFM, with a much lower cost having the similar performances compared to the conventional AFMs in order to achieve technology revolution in nano industry.

Z Motorized Stage
Auto Approach to Samples
Z axis motorized stage makes the probe
tip approach to the sample automatically
and makes it ready to image the sample.

CCD
Easy Monitoring of the Tip Location
High resolution CCD camera is used to
monitoor the tip location on the sample.

Z Nano Positioning Scanner
Fast and Accurate Scanning
A PZT or a voice coil motor regulates the
contact, non-contact, and other application
modes for AFM imaging,repectively.

Probe Tip
Easy Installation of the Probe Tip
The use of piezo-resistive sensor mounted
to the probe tip removes the problem of the
conventional difficulty of the optical alignment.

XY Nano Positioning Scanner
A New Voice Coil Driven Scannner
A voice coil motor is used for positioning the
nano scanner to have easy and accurate
control as well as simple mechanical
configuration without the hysteresis effect.

XY Motorized Stage (option)
Fast Sample Moving and
Loading/Unloading
2 Axis motorized stages are used to move the
sample to a pasition of interest and pulls out
the XY nano positioning scanner quickly for
fast sample loading/unloading.

* Features

ㆍSelf-sensing PR sensor
ㆍEasy exchange of cantilever tip : No need of alignment
ㆍHigh resolution
   - XY nano positioning scanner : VCM, 100 x 100㎛, 0.5㎚ resolution
   - Z nano positioning scanner : PZT, 10㎛, 0.1㎚ resolution
ㆍTip monitoring using CCD
ㆍFast sample loading/unloading and movement outside the enclosure
   using motorized stages

ㆍTwo options available
   Basic option
   - AFM basic module
   - Basic application mode : contact, non-contact
   - AFM scanner controller : XY, Z nano positioning scanner
   - Tip monitoring CCD
   - Image display S/W
   - Image analysis S/W
   - Scan control S/W
   - 100㎛ x 100㎛ XY nano positioning scanner

   Extended option
   - Motorized stage (30㎜ x 30㎜)
   - Active vibration isolating table
   - Mode extension module : force modulation, phase modulation
   - 200㎛ x 200㎛ XY nano positioning scanner

* Feature Comparison

Performance	Company A	Company B	EM4SYS
Sample Loading/Unloading	Slow	Medium	Fast
Auto Approach	Yes	Yes	Yes
Tip lnstallation	Difficult	Easy	Easy
Nano Positioning Scanner Driving Method	Piezo	VCM	VCM
Tip Locating Monitoring	Microscope +CCD	Magnification Lens	CCD
lmage Sensing Method	Optical type	PR type	PR type
Sale Price	High	High	Low

3D-Standard grating
(10㎛x10㎛, 15㎚ depth)

3D-Standard grating
(10㎛x10㎛, 110㎚ depth)

3D-Vicinal Si bunching
(0.1㎛x0.1㎛, 12㎚ depth)

3D-AI projection pattern
(5㎛x5㎛, 12㎚ depth)

2D-Membrane(150㎚ hole)
(5㎛x5㎛)

3D-Membrane(150㎚ hole)
(5㎛x5㎛)

2D-Poly ethylene latex
(1㎛x1㎛, 200㎚ depth)

3D-Poly ethylene latex
(1㎛x1㎛, 200㎚ depth)

2D-Copolymer
(2㎛x2㎛)

3D-Copolymer
(5㎛X5㎛)

2D-Standard grating
(10㎛x10㎛, 110㎚ depth)

3D-Standard grating
(10㎛x10㎛, 15㎚ depth)

* Specification

Spec.	Components	Performance
Mechanical	XY Nano Positioning Scanner	⊙ Single module parallel kinematics flexure stage with VCM (Voice Coil Motor) - Sample size : up to 50㎜ × 50㎜, 10㎜ thick - Sample mass : up to 700gr - Scanning area : 100 × 100㎛, 200 × 200㎛ (Optional) - Resolution : ＜ 0.5 nm - Manual stage travel : 30㎜ × 30㎜ (Optional)
Mechanical	Z Nano Positioning Scanner	⊙ Single module flexure stage with PZT - Scanning range : 10 ㎛ - Resolution : ＜ 0.1 nm
Electrical		⊙ Power supply : 220V AC ⊙ DSP Multi TMS320 LF2812 - 16 bit ADC, 4 channels - 16 bit gain controlled DAC, 3 channels - USB interface

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