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Nano Measuring Instrument
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An atomic force microscopy(AFM) can look inside a nano world that can't be seen with a bare eye since it has a resolution of atomic level. It can see a tiny thing as small as 1/100,000 of a hair thickness (100um). It is used for obtaining the 3D measurement of the metrology, topography, hardness, roughness, electricity and magnetics of materials with nano scale resolution. We aim to distribute the AFM for the personal use purpose, called a personal AFM, with a much lower cost having the similar performances compared to the conventional AFMs in order to achieve technology revolution in nano industry.

 

¤ýWide working range and high resolution
   - XY nano positioning scanner: VCM, 100 x 100§­ , 200 x 200§­(option), 0.1nm PZT 80 x 80§­ (option)
   - Z nano positioning scanner : PZT, 10§­, 0.1§¬
¤ýSelf-sensing PR sensor(standard model ) or optical sensor(extended model)
¤ýEasy exchange of cantilever tip : No need of alignment ( standard model)
¤ýAuto approach to a specimen
¤ýTip monitoring using CCD>
¤ýFast sample loading/unloading

 

1) NX-I Model
   - AFM basic module
   - Basic application mode : contact, non-contact
   - AFM scanner controller : XY, Z nano positioning scanner
   - Sample monitoring CCD- Image analysis & processing S/W
   - System control S/W
   - 100 x 100§­ or 200 x 200§­(option) XY nano positioning scanner
   - Cantilever tip with a piezo resistive sensor
   - 0.3§¬ mechanical resolution

 
 2) NX-II Model
   - AFM Basic module
   - Extended application modes(options) : force modulation, LFM, phase modulation, etc
   - AFM scanner controller : XY, Z nano positioning scanner
   - Tip & sample monitoring high magnification CCD- Image analysis & processing S/W
   - System control S/W
   - 100 x 100§­ or 200 x 200§­ (option) XY nano positioning scanner
   - Cantilever tip with an optical sensor - 0.03§¬ mechanical resolution




 


Spec. Components Performance
Mechanical XY Nano Positioning Scanner
 ¢Á Single module parallel kinematics flexure stage
    (VCM type or PZT type)
  - Sample size : up to 50§® ¡¿ 50§®, 9§® thick
  - Sample mass : up to 700gr
  - Scanning area : 100 ¡¿ 100§­,
                    200 ¡¿ 200§­ (option)
  - PZT 70 x 70§­ (option)
  - Resolution : £¼ 0.1 nm(NX-I model)
                 £¼ 0.1 nm(NX-II model)
  - Capacitive Sensor (option)
XY motorized stage(option)     - Scanning area : 30 x 30§® , 50 x 50§®
XY manual stage(option)     - Manual stage travel : ¡¾2.5~12.5§®
Z Nano Positioning Scanner

  ¢Á PZT driven single module flexure scanner
    - Scanning range : 10§­
    - Resolution : £¼0.3§¬ (NX-I model)
                         £¼0.03§¬ (NX-II model)
Electrical Sensor   ¢Á Piezo-resistive type(NX-I model) or
     Optical sensor(NX-II model)
Controller   ¢Á Signal processing part : TMS320 LF2812(DSP)
  ¢Á Controller part : AT94K10L and MSC1211Y3
                    (Micro controller)
   - High speed 16bit ADC & DAC, 2 channels for    
     control and Imaging.
    - 16 bit DAC, 4 channels for XY nano scanner
    - 12 bit DAC, 4 channels for accessory input
    - USB or RS-232 interface
Software

   System control software Image display & analysis Software

SIZE

AFM main body
  286 (L) x 300 (W) x 290§® (H)
Acoustic enclosure    313 (L) x 300 (W) x 370§® (H)
Controller    415 (L) x 250 (W) x 95§® (H)
 

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