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Home > Product > Nano measuring instrument


An atomic force microscopy(AFM) can look inside a nano world that can't be seen with a bare eye since it has a resolution of atomic level. It can see a tiny thing as small as 1/100,000 of a hair thickness (100um). It is used for obtaining the 3D measurement of the metrology, topography, hardness, roughness, electricity and magnetics of materials with nano scale resolution. We aim to distribute the AFM for the personal use purpose, called a personal AFM, with a much lower cost having the similar performances compared to the conventional AFMs in order to achieve technology revolution in nano industry.

 

Z Motorized Stage
Auto Approach to Samples
Z axis motorized stage makes the probe
tip approach to the sample automatically
and makes it ready to image the sample.

CCD
Easy Monitoring of the Tip Location
High resolution CCD camera is used to
monitor the tip location on the sample.

Z Nano Positioning Scanner
Fast and Accurate Scanning
A PZT or a voice coil motor regulates the
contact, non-contact, and other application
modes for AFM imaging respectively

Probe Tip
Easy Installation of the Probe Tip
The use of piezo-resistive sensor mounted
to the probe tip removes the problem of the
conventional difficulty of the optical alignment.

XY Nano Positioning Scanner
A New Voice Coil Driven Scanner
A voice coil motor is used for positioning the
nano scanner to have easy and accurate
control as well as simple mechanical
configuration without the hysteresis effect.

XY Motorized Stage (option)
Fast Sample Moving and
Loading/Unloading
2 Axis motorized stages are used to move the
sample to a position of interest and pulls out
the XY nano positioning scanner quickly for
fast sample loading/unloading.

 




¤ýWide working range and high resolution
   - XY nano positioning scanner: VCM, 100 x 100§­ , 200 x 200§­(option), 0.1nm PZT 80 x 80§­ (option)
   - Z nano positioning scanner : PZT, 10§­, 0.1§¬
¤ýSelf-sensing PR sensor(standard model ) or optical sensor(extended model)
¤ýEasy exchange of cantilever tip : No need of alignment ( standard model)
¤ýAuto approach to a specimen
¤ýTip monitoring using CCD>
¤ýFast sample loading/unloading

¡¤ Standard model
   - Basic application modes : contact, non-contact, force modulation(option), phase detection(option)
   - High resolution nano scanner : XY axis(0.1§¬ resolution), Z axis(0.1§¬resolution)
   - Tip monitoring CCD
   - Image display S/W
   - Image analysis S/W
   - System control S/W

 ¡¤ Extended model
   - Standard model with advanced application modes : EFM, MFM
   - High resolution nano scanner : XY axis(0.1§¬ resolution), Z axis(0.05§¬resolution)



3D-Standard grating
(10§­x10§­, 15§¬ depth)

3D-Standard grating
(10§­x10§­, 15§¬ depth)

3D-Vicinal Si bunching
(0.1§­x0.1§­, 12§¬ depth)

3D-AI projection pattern
(5§­x5§­, 110§¬ depth)

Vicinal Si bunching
(5§­x5§­, 12§¬ depth)

3D-Profile of test gration
(5§­x5§­, 110§¬ depth)

2D-Poly ethylene latex
(1§­x1§­, 200§¬ depth)

3D-Poly ethylene latex
(1§­x1§­, 200§¬ depth)

3D-Profile of test grationg
(10§­x10§­, 15§¬ depth)
Membrane
non-contact mode
(5§­x5§­)
2D-AI projection pattern
(5§­x5§­)
3D-AI projection pattern
(5§­x5§­)


Spec. Components Performance
Mechanical XY Nano Positioning Scanner
 ¢Á Single module parallel kinematics flexure stage
    with PZT (option)
  - Sample size : up to 50§® ¡¿ 50§®, 10§® thick
  - Sample mass : up to 500gr
  - Scanning area : 100 ¡¿ 100§­, 200 ¡¿ 200§­ (option)
  - PZT 80 x 80§­ (option)
  - Resolution : £¼ 0.1 nm
  - Capacitive Sensor (option)
  - Manual stage travel : 30§® ¡¿ 30§® (option)
Z Nano Positioning Scanner
 ¢Á guide flexure stage with PZT
  - Scanning range : 10 §­
  - Resolution : £¼ 0.1 nm
Electrical
 ¢Á Power supply : 220V AC
 ¢Á DSP Multi TMS320 LF2812
  - 16 bit ADC, 4 channels
  - 16 bit gain controlled DAC, 3 channels
  - USB interface

 
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