▒▒ EM4SYS ▒▒

▒▒ EM4SYS ▒▒

Personal Atomic Force Microscope
Nano Positioning Stage
Confocal Microscope
6-axis Desktop Active Vibration Isolation
System
Capacitive Sensor

Laser Scanning Vibrometer(LSV-D)
Laser Vibrometer
(LV-110D)
Laser Displacement Sensor(PSD)
Laser Scanner

Specimen Automatic Positioner
Precision Motorized Stage

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Home > Product > Nano measuring instrument

The nano positioning scanner driven by PZT or VCM can move samples with a high speed and accuracy as well as large working range. It is suitable to scan with nano level accuracy for various applications such as SPMs.

ㆍOptimized leaf spring structure
ㆍVivration reduction control
ㆍVariable size and multi-DOF of the scanner
ㆍBuilt-in high resolution capacitive sensor(resolution:0.1nm)

Resolution	< 0.1nm
Bandwidth	300Hz (PZT, open loop)
Repeatability	< 0.05nm
Scanning area	0 ~ 100 x 100㎛ (PZT type) 0 ~ 300 x 300㎛ (VCM type)
Load weight	700grf
Size	Various dimension

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