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Home > Product > Nano measuring instrument
advantages of large workspace and high precision with a low cost.
It can be used for the scanning and positioning applications of the nano system such as the scanning probe microscope (SPM).
Nano positioning stage using PZT actuators is also available


* Application

Nano positioning stage using voice coil actuatorsh have several

Large workspace using a voice coil motor(VCM)
 - 100nm by 100nm
 - 200nm by 200nm
No over-shoot in the resonance frequency offers a high recision
Capacitive sensors with 0.1 nm resolution is included Motoin planner S/W is included.


* Specifications
Resolution < 0.1 §¬
Bandwidth 100 Hz (open loop) 200 Hz (closedloop)
Repeatability < 1 §­
Scanning area 100 x 100 §­, 200 x 200 §­
Load weight 700 gr
Size Various dimension

 
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