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Home > 제품소개 > 정밀이송스테이지 분야


* 제품개요 및 용도

 ㆍ금속 및 플라스틱의 삼차원 형상 측정
 ㆍ판재 표면 평면도(flatness)
 ㆍ표면 직진도 측정

* 제품 특징

 ㆍ작업 영역 확대, 정밀도 높인 저가형 3차원 형상 측정기
 ㆍ측정체의 거리, 면적등의 기계적, 통계적 정보 산출
 ㆍ다양한 포맷을 지원하는 데이터 입력 및 출력 기능 지원

* 동전의 앞면과 뒷면 측정



* Measurement principle of optical triangulation

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LD
light-emitting element
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 Collimating lens
focusing the beam on the object surface
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 PSD or CCD
light-receiving element
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 The position of the beam spot
variation of surface height
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 The position of the beam spot
variation of surface height
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 Displacement
movement of the beam spot


* Sensor gain variation according to the slope of the shape surface

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Sensor gain is changed according to the slope.
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 The steeper the slope is, the larger the incorrectness of height value is.
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 Sensor gain variation is greater as the distance between the sensor and surface is increased.
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 Using gap control, the height is adjusted to the nominal distance.


* Sensor gain variation according to the slope of the shape surface


* Specification
 Accuracy
 < 10 ㎛
 2-D stage working range
 12.8mm × 12.8mm
 Bandwidth of vertical axis stage
 10 Hz
 Optical sensor type for measurement
 CCD(Charge-Coupled Device)
 Data Communication
 RS-232C serial

 
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